Gas mass flow controller
The SFC5000 series facilitates extremely precise and repeatable control over a wide dynamic measurement range. The outstanding performance of the gas mass flow controllers is based on CMOSens® technology, which integrates a high-precision sensor element and analog/digital signal processing circuitry on a single CMOS silicon chip. The SFC5000 series gas mass flow controllers are an ideal solution for a wide variety of applications across the industrial and medical markets.
