Liquid Flow Sensor
In response to the high-end needs of coating systems, we introduce a new product, the SLQ-QT105 liquid flow sensor, a semiconductor-grade sensor solution for measuring hydrocarbon compounds with flow rates below 120 ML/MIN, such as photoresists and solvents. Thanks to fully validated thermal micro-sensor technology, it opens new heights in sensitivity, stability, and speed. The extremely short response time of the liquid flow sensor SLQ-QT105 allows accurate monitoring.