Liquid Flow Sensor - SLQ-QT105

1. Product Description of Liquid Flow Sensor SLQ-QT105

For the high-end needs of coating systems, we introduce a new product, the SLQ-QT105Liquid Flow Sensor, a semiconductor-grade sensor solution for measuring hydrocarbon compounds with flow rates below 120 ML/MIN, such as photoresist and solvents. Utilizing fully validated thermal micro-sensor technology, it opens up new heights in sensitivity, stability, and speed.Liquid Flow SensorThe extremely short response time of the SLQ-QT105 allows accurate monitoring of high-speed dynamic processes, such as rapid dispensing actions.Liquid Flow SensorThe SLQ-QT105 is equipped with a 4x3 mm PFA tube. The device has no moving parts and enables non-invasive measurement within the wall of a straight-through flow channel. The sensor features a smart digital interface, and the reliable RS485 communication protocol is suitable for long-distance communication with large bus capacity.

2. Features of Liquid Flow Sensor SLQ-QT105

• Measurement range up to 120 ML/MIN (hydrocarbon liquids)

• Highest resolution maintained even in low flow ranges

• Fast response time as low as 30 ms

• RS485 digital interface

• For measuring photoresist and solvents

• Straight-through tube, no moving parts

• Guaranteed cleanliness

• Excellent chemical resistance, inert materials

• Wetted materials: PCTFE, only quartz glass

• Maximum operating pressure 3 bar (pressure can be increased for specific requirements)

3. Application Fields of Liquid Flow Sensor SLQ-QT105

• High-end semiconductor process control

• Rapid dispensing operations