Micro Flow Sensor
The F1012 micro flow sensor chip consists of two thermopiles and a heating resistor: the thermopiles are symmetrically distributed upstream and downstream of the heating resistor; the heating resistor and the hot junctions of the thermopiles are on a thermally insulating base. The heating resistor heats the hot junctions of the thermopiles. The temperature gradient between the hot and cold junctions of the thermopiles generates an output voltage, which is the intrinsic Seebeck effect.
