Micro Flow Sensor - F1012

1. Micro Flow Sensor F1012 Product Description

F1012 Micro Flow Sensoruses thermodynamic principles to monitor the flow of gas media in the flow channel, with excellent accuracy and repeatability. The F1012 micro flow sensor has a built-intemperature sensorand each unit is individually calibrated for temperature compensation; it also has a linear analog voltage output for ease of use.Micro Flow SensorF1012The chip consists of two thermopiles and a heating resistor: the thermopiles are symmetrically distributed upstream and downstream of the heating resistor; the heating resistor and the hot junctions of the thermopiles are on a thermally insulating base. The heating resistor heats the hot junctions of the thermopiles. The temperature gradient between the hot and cold junctions of the thermopiles generates an output voltage, i.e., the intrinsic Seebeck effect. When the fluid is stationary, the isotherms are symmetrically distributed along a line perpendicular to the center of the heating resistor, and the temperatures at symmetric positions on both sides of the heating resistor are the same. When the fluid flows from right to left, the isotherms tilt to the left. The temperatures at symmetric positions on both sides of the heating resistor are no longer the same. The temperature difference can be measured by the thermopiles placed on both sides of the heating resistor. Since the heat transfer of the fluid is only related to the fluid mass and its heat capacity, the sensor can directly measure the mass flow rate of the fluid.

2. Micro Flow Sensor F1012 Features
New generation MEMS sensor chip technology
No drift, no hysteresis
High accuracy, fast response, good repeatability
Low power consumption (using pulsed excitation current)
Accurately measures very small flow rates
Fully calibrated and temperature compensated
Linear or square root output; analog or digital output

3. Micro Flow Sensor F1012 Main Applications
Medical equipment: respirators, spirometers, anesthesia control, oxygen control, etc.
HVAC: Variable Air Volume (VAV) systems, filter monitoring, fan ventilation control, etc.
Industrial process control: burner control
Air and environmental protection
Portable instruments

4. Micro Flow Sensor F1012 Technical Specifications

Model	F1012 Micro Flow Sensor
Range	20、30、50、100、200、500、1000、1200、2000scm
	Min	Typical	Max	Unit
Full Scale Output	4.90	5.00	5.10	V
Zero Flow Output	0.96	1.00	1.04	V
Operating Voltage	7.0	10.0	14.0	V
Operating Current	15	25	30	MA
Accuracy	-	±1.5	±2.5	%F.S
Repeatability	-	±0.3	±0.5	%F.S
Annual Drift	-	±0.1	±0.5	%F.S