The American Siargo gas mass flow sensor
The FS1015CL series MEMS gas mass flow sensor is designed for the measurement and process control of various medical gases. The product utilizes a micro-electromechanical system (MEMS) flow sensing chip and is suitable for all types of clean gases. It features low cost, easy installation, and no need for temperature and pressure compensation, and can replace traditional volumetric or differential pressure flow meters.