US Siargo Gas Mass Flow Sensor - FS1015CL

I.US SiargoMEMS Gas Mass Flow Sensor FS1015CL SeriesProduct Description：

The FS1015CL series MEMS gas mass flow sensor is designed for the measurement and process control of various medical gases. The product uses a MEMS flow sensing chip and is suitable for various clean gases. It is low cost, easy to install, requires no temperature or pressure compensation, and can replace traditional volumetric or differential pressure flow meters.

II.US SiargoMEMS Gas Mass Flow Sensor FS1015CL SeriesProduct Features:

• Designed for flow measurement needs of ventilators and anesthesia machines

• High sensitivity, using thermal mass flow principle to measure flow rates as low as 8 mm/sec

• No bypass structure, low pressure drop

• High zero stability of the sensor

• Reusable after disinfection with sterilizing solution

• Auto-ranging switch design improves measurement accuracy

• User interface on host device allows easy linear output

 

III.US SiargoMEMS Gas Mass Flow Sensor FS1015CL SeriesMechanical Drawing:

 

IV.US SiargoMEMS Gas Mass Flow Sensor FS1015CL SeriesTechnical Parameters:

Product	FS1015CL	Unit
Flow Range	0~100 / 0~150	SLPM
Turndown Ratio	100：1
Accuracy	±(1.5+0.2FS)	%
Repeatability	0.25	%
Zero Output Drift	±30	mV
Output Drift	±0.12	%/ ℃
Response Time	8	ms
Operating Voltage	5±1%	Vdc
Output Method	Linear, analog voltage 0.5~4.5 Vdc
Flow Pressure Drop	1300	Pa
Operating Pressure	0.2	MPa
Operating Temperature	-10~+55	℃
Storage Temperature	-20~+65	℃
Operating Humidity	<95% RH (no icing, no condensation)
Electrical Interface	5-pin connector, AMP 103956-4
Mechanical Interface	ISO-15mm
Calibration Method	Air, 20°C, 101.325 kPa
Weight	21.5	g