Semiconductor etching workshop boron trichloride gas alarm BCl₃ leakage online monitoring - SKA/NE-301 (BCL3)
Adopts UK-imported intelligentECsensor, intrinsically safe technology, can support multi-gas and multi-range detection, and can provide customized products according to user needs;
Product Introduction
Semiconductor etching workshop boron trichloride gas alarm BCl₃ leakage online monitoring
1. Core detection parameters
Detection gas: boron trichloride (BCl₃, high-purity industrial toxic gas)
Detection principle: high-performance four-electrode electrochemical sensing principle, high precision, strong stability, good anti-interference, specially adapted for boron trichloride toxic gas detection
Optional ranges: conventional0-10ppm、0-50ppm(recommended range for conventional industrial safety monitoring), customizable0-100ppm、1000ppm、2000ppm、6000ppmmultiple specifications
Resolution:0-10ppm/50ppmRange:0.001ppm；0-1000ppmRange:0.01ppm；1000ppmAbove range:1ppm
Measurement accuracy:≤±2%F.S(high-precision model)/≤±3%F.S(conventional industrial model), fully superior to national standard detection error requirements
Repeatability:≤±1%FS, minimal data fluctuation, stable long-term monitoring data
Response time:T90≤20seconds, ultra-fast capture of gas leakage, rapid warning
Alarm threshold (industry standard): first-level low alarm5ppm（OSHAoccupational exposure limit), second-level high alarm10ppm, customizable threshold adjustment
2. Hardware protection and working condition parameters
Explosion-proof grade:ExdⅡCT6 Gb explosion-proof type, suitable for high-risk explosion-proof workshops, complies with industrial explosion-proof safety specifications
Protection rating:IP67, comprehensive waterproof, dustproof, short-term rainproof, acid and alkali corrosion resistance, suitable for outdoor, humid, and dusty harsh working conditions
Structure and process: nano anti-corrosion coating on the body, anti-aging, anti-exposure, resistant to industrial corrosion; built-in industrial-gradeEMCmodule, second-level lightning protection, resistance to strong magnetic and electrostatic interference
Operating temperature:-32℃～+50℃, wide temperature operation, suitable for different working conditions in north and south plants
Sensor life: conventional working conditions2-3years, up to in high-quality working conditions3-8years, long service life and low operation and maintenance cost
Detection method: diffusion type as standard, optional pump-suction type, flow-through type, pipeline type, suitable for detection in confined spaces, pipelines, and open workshop areas
Installation method: conventional wall-mounted installation, supports pipeline-type and flange-type customized installation, suitable for various plant layouts
Semiconductor etching workshop boron trichloride gas alarm BCl₃ leakage online monitoring
3. Signal output and intelligent functions
Output signal: standard three-wire4-20mAAnalog signal,RS485-RTUdigital signal, supports0-5Vvoltage output, multiple signals adapt to different security systems
Linkage function: optional1-2set passive/active contact output, can link fans, solenoid valves, and spray equipment to achieve automatic exhaust and gas source shutoff upon leakage
Display method: high-definition backlightLCDdigital display screen, real-time display of gas concentration, alarm status, and equipment fault information, intuitive and clear data visualization
Alarm method: high-decibel audible and visual dual alarm, immediate reminder when exceeding the limit, suitable for noisy industrial workshop environments
Intelligent functions: full-range automatic temperature and humidity compensation, data correction; automatic equipment fault self-check; historical data storage and traceability, supports remote data upload
4. Electrical and installation parameters
Electrical interface: standard3/4NPT, optionalM20×1.5internal thread,1/2NPT, suitable for conventional industrial wiring interfaces
Wiring specifications:4-20mAThe signal uses three-core shielded cable,RS485The signal uses four-core shielded cable, ultra-1000recommended wire diameter for meter wiring≥1.5mm, shielding layer grounding ensures stable signal
Semiconductor etching workshop boron trichloride gas alarm BCl₃ leakage online monitoring
5. Implementation standards and applicable scenarios
Compliance: Strictly follow national standardsGB 12358-2024"Combustible Gas Detection Alarm" industrial detection standard, performance superior to national standard requirements, worry-free compliance for safety supervision, annual inspection, and acceptance
Applicable scenarios: widely used in semiconductor manufacturing, photovoltaic industry, fine chemicals, new material research and development, special gas storage workshops, laboratories, and other places with boron trichloride leakage risks, focusing on toxic gas leakage monitoring to avoid risks of personnel poisoning, equipment corrosion, and plant safety accidents
Main Application Areas
- Semiconductor Etching — Monitors boron trichloride leaks in etching processes to ensure worker safety and process integrity.
- Chemical Vapor Deposition — Detects BCl₃ leaks during CVD operations, preventing hazardous exposure and equipment damage.
- Laboratory Research — Provides reliable BCl₃ monitoring in research settings where small-scale experiments involve hazardous gases.
- Industrial Gas Storage — Ensures safe storage and handling of boron trichloride cylinders by detecting leaks early.
- Pharmaceutical Manufacturing — Monitors BCl₃ in pharmaceutical synthesis processes to maintain a safe working environment.
Keywords：BCl3 gas alarm, boron trichloride detector, online gas monitor, semiconductor gas leak, BCl3 leak detection, industrial gas alarm, electrochemical gas sensor, BCl3 monitoring system
