Swiss Neroxis Thermal Conductivity Gas Sensor - MTCS2601

1. Thermal Conductivity Gas Sensor MTCS2601Description:

The MTCS2601 sensor is a micromachined thermal conductivity sensor consisting of 4 Ni-Pt resistors based on MEMS technology. This sensor is mounted in a small SMD package. Combined with low-power CMOS standard integrated circuits, it is ideal for OEM leak detection or vacuum detection based on the Pirani principle, requiring ultra-low power, long life, and maintenance-free operation. Suitable for primary pressure control in harsh environments, where power and size constraints exist, or for gas leaks, moisture, or intrusion.

2. Thermal Conductivity Gas SensorMTCS2601Features:

MEMS sensor follows the physical Pirani principle without chemical reactions, based on changes in gas thermal conductivity with pressure

Measurement range: 0.0001~1000mbar, excellent repeatability
Heating resistor on silicon wafer with excellent temperature compensation
Ultra-small sensor gas volume e.g. <0.1cm3
Stable and long MTBF (>30000 hours), based on physical impedance sensing principle
Ultra-low power consumption (<6mW), due to MEMS sensor with small heating element
Ultra-fast response time <50mS
Insensitive to mounting position
Can be used in cross-talk gas environments

Compatible with a simple constant temperature circuit

3. Thermal Conductivity Gas SensorMTCS2601Applications:

1. As gas concentration measurement sensor applications:
Monitoring of H2, CH4, CO2, LPG gases in indoor and outdoor air
• Process control in food industry (e.g., CO2 measurement in carbonated beverages)
• Hydrogen sensors for fuel cells
• CH4 measurement in biogas plants
• Detection of refrigerant gases (CFC, PFC, HFCs, etc.)
• Electronic products (e.g., helium control in diving equipment)
• Respiratory monitoring (medical)
• Leak detection in closed systems operating under inert gas (e.g., strain gauges, hard disk quality control, etc.)

2. As vacuum/pressure measurement sensor applications:
• Fixed and portable analytical instruments
• Leak detection and primary vacuum control in closed systems (e.g., kinetic energy storage systems)
• Vacuum equipment used in semiconductor industry
• Food industry (vacuum packaging machines)
In general, the Pirani micro-sensor occupies a small area and can be integrated into any primary vacuum system requiring control (e.g., seal control, potential corrosion, or accidental opening)

4.Thermal Conductivity Gas SensorMTCS2601Recommended Operating Conditions

The MGSM2601 has 4 separately connected resistors: Rm1 and Rm2 are located on the membrane and used for heating/measurement; Rt1 and Rt2 are located on the 'cold part' of the sensor and used for temperature measurement and compensation. For pressure measurement in low vacuum, constant
overtemperature operation mode is recommended. Since the change in thermal conductivity with pressure is significant over a certain range, it can be quickly adapted to the application, which is an excellent way to avoid sensor damage.

Storage Conditions
Temperature: -40~100°C
Humidity: 0~100%RH, non-condensing

Mechanical Stress Test
Gravity acceleration: 1000g, 0.2mS, half-sine wave
Vibration: 10g RMS, sine wave: 20~2000Hz