AMTAGP11 Series Piezoresistive Vacuum Gauge - AMTAGP11 Series
| Parameter | Value |
|---|---|
| Product Model | AMTAGP11 Series |
| Measuring range | 0~100Torr、0~1000Torr |
| Accuracy | ±0.5%FS |
| Power supply voltage | 12~24VDC |
| Output signal | 0~10VDC、4~20mA |
| Overload Pressure | 300KPa |
| Load Resistance | 10kΩ |
| Operating Temperature | 5~45℃ |
| Storage temperature | -5~+60℃ |
| Materials Exposed to Vacuum | 304 Stainless Steel |
| Connection Method | KF16 |
| Weight | 189g (no display version), 249g (digital display version) |
Product Introduction
The AMTAGP11 Series is a piezoresistive vacuum gauge that adopts a high-precision, high-stability diffused silicon oil-filled sensor core, as well as an integrated module design of electronic controller and sensor. Utilizing the piezoresistive effect of semiconductor materials and excellent elastic deformation performance, with exquisite packaging technology and perfect assembly processes, it ensures the quality and performance of the product. It provides analog voltage output and features high precision, high stability, strong corrosion resistance, good repeatability, light weight, and low maintenance cost.
Main Application Areas
- Semiconductor Manufacturing — Used for vacuum pressure monitoring in etching, deposition, and other semiconductor processes.
- Vacuum Coating — Ideal for pressure measurement in sputtering and evaporation coating systems.
- Research Laboratories — Suitable for various vacuum experiments and research applications requiring precise pressure control.
- Industrial Vacuum Systems — Monitors vacuum levels in industrial processes such as freeze-drying and vacuum packaging.
- Aerospace Testing — Used in vacuum chambers for simulating high-altitude and space environments.
Keywords：piezoresistive vacuum gauge, AMTAGP11, vacuum pressure sensor, high precision vacuum gauge, industrial vacuum gauge, 0-1000 Torr vacuum gauge, KF16 vacuum gauge, piezoresistive sensor
