Micro Flow Sensor - F1031

1. Description of Micro Flow Sensor F1031

The F1031 micro flow sensor utilizes thermodynamic principles to measure the flow of gas media in the flow channel, offering excellent accuracy and repeatability. The F1031 micro flow sensor has a built-in temperature sensor, and each unit undergoes proprietary temperature compensation calibration. It also features a linear analog voltage output for easy use.
The chip consists of two thermopiles and a heating resistor: the thermopiles are symmetrically distributed upstream and downstream of the heating resistor; the heating resistor and the hot junctions of the thermopiles are on a thermally insulating base. The heating resistor heats the hot junctions of the thermopiles. The temperature gradient between the hot and cold junctions of the thermopiles generates an output voltage, i.e., the intrinsic Seebeck effect. The isotherms on both sides of the heating resistor, when the fluid is stationary, are symmetrically distributed along a line perpendicular to the middle of the heating resistor, and the temperatures at symmetric positions on both sides of the heating resistor are the same. When the fluid flows from left to right, the isotherms tilt to the right. The temperatures at symmetric positions on both sides of the heating resistor are no longer the same. The temperature difference can be measured by the thermopiles placed on both sides of the heating resistor. Since the heat transfer of the fluid depends only on the fluid mass and its heat capacity, the sensor can directly measure the mass flow rate of the fluid.

2. Features of Micro Flow Sensor F1031
New Generation MEMS Sensor Chip Technology
No Drift, No Hysteresis
High Accuracy, Fast Response, Good Repeatability
Low Power Consumption (using pulsed excitation current)
Accurately Measures Very Small Flow Rates
Fully Calibrated and Temperature Compensated
Linear or Square Root Output; Analog or Digital Output

3. Main Applications of Micro Flow Sensor F1031
Medical equipment: respirators, spirometers, anesthesia control devices, oxygen control, etc.
HVAC: Variable Air Volume (VAV) systems, filter monitoring, fan ventilation control, etc.
Industrial process control: burner control
Air and environmental protection
Portable instruments

4. Technical Specifications of Micro Flow Sensor F1031

Model	F1031 Micro Flow Sensor
Range ①	20、35、50、100、150、200SLM②
	Min	Typical	Max	Unit
Full Scale Output	4.90	5.00	5.10	V
Zero Flow Output	0.96	1.00	1.04	V
Output Impedance	-	200	-	Ω
Operating Voltage	7.0	10.0	14.0	V
Operating Current	15	25	30	mA
Accuracy	-	±1.5	±2.5	%F.S
Repeatability	-	±0.3	±0.5	%F.S
Annual Drift ③	-	±0.1	±0.5	%F.S
Operating Pressure ④	-	-	100	kPa
Response Time	5	10	15	ms
Operating Temperature ⑤	-25	-	65	℃
Storage Temperature	-40	-	90	℃

Note: Product specifications are subject to change without notice.