Pirani Vacuum Sensor - F6000
Ultra-low power consumption <5 mW
Fast response time <5 ms
Shock resistance up to 1000g
Minimum measurable gas volume as low as 0.1 cm3
Low noise
High resolution
Temperature sensing on the same chip
Long-term stability
Can be cleaned by solvent immersion to extend service life
Product Introduction
Pirani Vacuum Sensor F6000 Product Description
The F6000 series MEMS Pirani vacuum sensor provides a breakthrough vacuum measurement solution. This sensor features a tiny form factor, ultra-low power consumption, long lifespan, low field maintenance, and low cost.
Based on the principle that the thermal conductivity of gas is proportional to pressure in the low vacuum range, the F6000 series vacuum sensor measures the subtle resistance changes in a heating element caused by heat transfer to the surrounding gas.The heating element (i.e., the measuring resistor) consists of a platinum thin-film resistor placed on a thermal insulation membrane. The membrane is suspended over a micromachined 25 μm deep cavity, with the cavity bottom surface parallel to the membrane to ensure precise measurement of heat transfer rate. Due to the extremely small gas volume being measured (i.e., small cavity volume), Winsen sensor provides ultra-low power consumption and fast response time.
The F6000 series vacuum sensor also provides a reference resistor with the same temperature coefficient of resistance (TCR) as the measuring resistor, placed on the sensor chip substrate. The sensor circuit can use it for ambient temperature compensation.
With the advantages of high reliability, low cost, ease of use, and ultra-low power consumption, miniaturized Pirani technology manufactured using MEMS processes is becoming an industry standard. The F6000 series MEMS Pirani vacuum sensor helps customers fully leverage this trend to improve their existing products and develop new ones.
Operating temperature: -40°C to 125°C (higher temperature models available)
Humidity: 0 to 100% RH, non-condensing
Shock resistance: 1000g
Overpressure: 27.5 Bar
Pirani Vacuum Sensor F6000Sensor Features
Ultra-low power consumption <5 mWFast response time <5 ms
Shock resistance up to 1000g
Minimum measurable gas volume as low as 0.1 cm3
Low noise
High resolution
Temperature sensing on the same chip
Long-term stability
Can be cleaned by solvent immersion to extend service life
Pirani Vacuum Sensor F6000Main Applications
Analytical instrumentsLeak detection in closed systems using fore vacuum
Semiconductor equipment
Vacuum packaging machines
Portable digital vacuum gauges
Small mechanical systems (e.g., pumps) to achieve specified vacuum levels
Low-cost vacuum switches to verify vacuum below 1 Torr
