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Swiss IST Thermal Mass Flow Sensor MFS02
Swiss IST Thermal Mass Flow Sensor
Swiss IST Thermal Mass Flow Sensor

Swiss IST Thermal Mass Flow Sensor - MFS02

High chemical resistance to corrosive gases and vapors
Different sensitivities and circuit topologies available
Customization supported
Flow direction measurement

Model: MFS02

Product Introduction


Swiss IST thermal mass flow sensor MFS02 is suitable for fast-response gas flow and direction measurement


Swiss IST thermal mass flow sensor MFS02 features:

Extremely high resolution in CTA mode for high flow and fast response applications

Suitable for measuring very low flow and leak detection applications via bridge circuits

Extremely high measurement dynamic range in CTA mode (10,000,000:1), non-bypass mode
High chemical resistance to corrosive gases and vapors
Different sensitivities and circuit topologies available
Customization supported

Flow direction measurement



Swiss IST thermal mass flow sensor MFS02 parameters:

Parameters


Dimensions (L / L2 x W x H / H2 in mm)

 

 

 

Chip

 

5.0 x 3.4 x 0.5

 

PCB Standard

38.2 x 10.8 x 1.0 / 2.0

PCB Bare

34.2 / 37.4 x 10.8 x 1.0 / 2.0

Measurement Range

0 m/s to 1.5 m/s (full bridge mode)

0 ml/min to 100 ml/min (full bridge mode)

0 m/s to 150 m/s (CTA mode)

0 l/min to 10 l/min (CTA mode)

Minimum Measurement Range

0 ml/min to 1 ml/min

Response Sensitivity

0.0003 m/s (20 microliter/min)

Measurement Accuracy

< 2% of true value (depending on circuit and calibration)

Response Time t63

< 10 ms

Temperature Range (Chip)

-40 °C to +160 °C

Temperature Range (Gas)

-40 °C to +80 °C (up to +80 °C below chip temperature)

Temperature Sensitivity

< 0.1% / K (depending on circuit design)

Connection Method

Pad Connection


Swiss IST Thermal Mass Flow Sensor MFS02 Dimensions: