Gas Mass Flow Controller - SFC5000 Series

SFC5000 Series Gas Mass Flow ControllerProduct Description

The SFC5000 series gas mass flow controller enables extremely precise and repeatable control over a wide dynamic measurement range. The outstanding performance of the gas mass flow controller is based on Sensirion's innovativeCMOSens® technology, which integrates a high-precision sensor element and analog/digital signal processing circuitry on a single CMOS silicon chip. On the chip, the sensor signal is directly converted into a fully calibrated, temperature-compensated digital signal. The mass flow controllers feature analog and digital interfaces. In addition, they enable new optional functions such as multi-gas measurement, gas identification, and self-test capabilities. The SFC5000 series gas mass flow controller is an ideal solution for various applications across the industrial and medical markets.

 

SFC5000 Series Gas Mass Flow ControllerFeatures

• High precision and repeatability

• Excellent long-term stability and reliability

• Wide dynamic range (turndown ratio 1000:1)

• Ultra-fast gas flow control (settling time less than 50 ms)

• Multi-gas, multi-range options and gas identification function

• Digital and analog interfaces

• Flexible mechanical connection options: sheet metal mounting, VCR and VCO, Swagelok, C-/W-Seal, etc.

• Calibration traceable to NIST standards

• Outstanding value from innovative CMOSens® technology

• Customized products available upon request

SFC5000 Series Gas Mass Flow ControllerApplication Areas

• Analytical instruments (e.g., gas chromatography, mass spectrometry)

• Medical devices (e.g., ventilators, anesthesia)

• Industrial process automation (e.g., coating, heat treatment)

• Semiconductor industry (e.g., plasma etching processes, thin film deposition)