US Siargo Gas Mass Flow Meter MEMS Flow Sensing Chip - MF3000 Series
Mass flow, time-domain sensing technology
Full range coverage from (0~2) SLPM to (0~1500) SLPM
High accuracy and excellent repeatability across the full range
Can measure multiple gases without special correction
Multiple output signal options
Supports multiple connection methods, easy to install and use
Product Introduction
US Siargo Gas Mass Flow Meter MEMS Flow Sensing ChipMF3000 Series Description:
The MF3000 series gas mass flow meter adopts a bypass design and uses our proprietary MEMS flow sensing chip, integrating time-domain flow sensing technology and intelligent electronic technology. Compared with traditional calorimetric flow sensing technology on the market, this unique time-domain flow sensing technology eliminates sensitivity to some common gases. For other sensitive gases, gas identification can be achieved with software. The MEMS chip surface is passivated with silicon nitride ceramic material and combined with waterproof and oil-proof nano coating, greatly improving product performance and reliability. Time-domain flow sensing technology also provides better linearity and significantly reduces temperature effects.
The MF3000 series gas mass flow meter can directly measure gas mass flow and is suitable for various clean, dry gases. The MF3000 measurement range covers from (0~2) SLPM to (0~1500) SLPM, with a maximum working pressure increased to 0.8MPa. The MF3000 provides multiple signal outputs, enabling remote data acquisition and configuration through RS485 or I2C digital communication interfaces, and optional NPN or PNP switch signal outputs. The MF3000 also features LED digital display and key functions, allowing users to adjust or query flow meter parameters on site.
US Siargo Gas Mass Flow Meter MEMS Flow Sensing ChipMF3000 SeriesProduct Features:
Mass flow, time-domain sensing technologyFull range coverage from (0~2) SLPM to (0~1500) SLPM
High accuracy and excellent repeatability across the full range
Can measure multiple gases without special correction
Multiple output signal options
Supports multiple connection methods, easy to install and use
US Siargo Gas Mass Flow Meter MEMS Flow Sensing ChipMF3000 Series Parameters:
