Product Introduction
US Siargo MEMS Mass Flow SensorFS1100 Series Description:
The FS1100 series mass flow sensors are manufactured using our self-developed Micro-Electro-Mechanical Systems (MEMS) flow sensing chip, integrated with a temperature sensor, and can provide both IC and dual analog voltage signal outputs simultaneously. The sensor directly measures mass flow without requiring temperature and pressure compensation. Its compact design and small dead volume make it suitable for various medical ventilators.
US Siargo MEMS Mass Flow SensorFS1100 Series Parameters:
| Item |
Parameter |
Unit |
| Flow Range |
-250~ +250SLPM |
|
| Flow Turndown Ratio |
100:1 |
|
| Flow Accuracy' |
±(2.0+0.5FS) |
% |
| Flow Repeatability |
0.5 |
% |
| Temperature Range |
-20~+80 |
°C |
| Temperature Accuracy |
±2.5 |
°C |
| Response Time |
5 |
ms |
| Power Supply |
5(±5%) |
VDC |
| Output Mode |
Linearity:Dual Analog Voltage0.5~2.5VDC, IC |
|
| ZuiPressure Drop at Max Flow |
<2000Pa@200SL PM |
|
| ZuiMaximum Working Pressure |
0.5 |
Mpa |
| Storage Temperature |
-20~+65 |
°C |
| Electrical Interface |
Molex 87831- 1041(THT) |
|
| Compliance. |
RoHS，REACH |
|
Remarks: 1, To ensure measurement accuracy, preheating is required before use.- -minutes;
2,The above parameters are measured at20°C, 101 .325kPa.
