Swiss IST Silicon Flow Sensor Thermal Mass Flow Sensor - SFS01

Sensor Technical Parameters

Dimensions (L x B x H in mm)

6.00 (±0.05) x 2.00 (± 0.02) x 0.525 (±0.01)

Operating temperature range

0 °C to +80 °C

Storage temperature range

-20 °C to +80 °C

Pressure load

Up to 1 bar (sustainable for 10 years on single side)

Sensor Electrical Parameters

Connection method

Bonding pads (recommended bonding process: aluminum wire wedge bonding)

Heater resistance

1‘000 Ω ± 20 %

Thermopile resistance

< 40 kΩ

Thermopile sensitivity

> 5 mV/mW

Thermopile synchronous sensitivity

< 9 %

Thermopile voltage

Typical value 5.5 mV/K

Heater output

Typical value 3-10 mW (gas), maximum tolerance: 20 mW

Flow Measurement Performance

Medium

Non-corrosive gases (5-95 % rH, non-condensing)

Measurement range

0.0 to 3.5 m/s

Sensitivity

0.002 m/s

Measurement accuracy

0.2 % F.S.

Response time t63

<5 ms

Temperature sensitivity (incomplete)

< 0.18 %/K F.S.

Position sensitivity

< 0.1 % F.S

Temperature sensitivity

< 4.0 % F.S