AMTAGP3 Series Composite Vacuum Gauge (Pirani and Cold Cathode) - AMTAGP3 Series
AMTAGP3 Series Parameters
| Parameter | Value |
|---|---|
| Supply voltage | 15~30VDC |
| Range (N₂ and air) | 1×10⁻⁶ ~ 1×10⁵Pa |
| Accuracy N₂ | ±30% reading |
| Repeatability (N₂) | ±5% reading |
| Output signal | 0~10VDC, RS485 compatible |
| Power consumption | ≤6W |
| Communication interface | RJ45 |
| Display unit | Pa, Torr, mbar, switchable |
| Materials exposed to air | 304/431 stainless steel |
| 工作温度 | 5~55℃ |
Product Introduction
The composite vacuum gauge (Pirani and cold cathode) combines the principles of cold cathode ionization for high vacuum measurement and Pirani method for low vacuum measurement, achieving precise measurement over a wide pressure range; equipped with a color LCD display (TFT-LCD) and intuitive button controls, it provides analog voltage output and RS485 communication protocol, facilitating connection and data exchange with various devices and systems. It features high precision, low energy consumption, high sensitivity, fast response, strong durability, good contamination resistance, and no need for heated filament. Widely used in semiconductor manufacturing and aerospace fields, meeting today's critical control application needs.
Main Application Areas
- Semiconductor Manufacturing — Used for vacuum process control in etching, deposition, and ion implantation equipment.
- Aerospace — Employed in space simulation chambers and vacuum testing systems for aircraft components.
- Vacuum Coating — Monitors pressure during thin-film deposition and surface treatment processes.
- Research Laboratories — Provides accurate vacuum measurement in scientific experiments and material research.
- Industrial Vacuum Systems — Ensures reliable pressure monitoring in heat treatment, drying, and degassing applications.
Keywords：pirani cold cathode gauge, combination vacuum gauge, wide range vacuum sensor, AMTAGP3 vacuum gauge, RS485 vacuum transmitter, cold cathode ionization gauge, pirani vacuum sensor, industrial vacuum measurement
