Product Introduction
Swiss Neroxis Thermal Conductivity Gas Sensor Miniature Pirani Vacuum Gauge Pressure TransducerMTCS2300 Description:
The MTCS2300 pressure transducer is a dedicated MEMS device that measures thermal conductivity based on the Pirani principle, available in compact TO8 or TO39 packages.
This sensor uses nickel-platinum resistance MEMS technology, integrating a large micromachined low-stress silicon nitride membrane, two thin-film heating resistors, and two compensation reference resistors on the bulk silicon into a miniature package.
This MEMS structure, combined with a simple CMOS standard integrated circuit for power and temperature analysis, is an ideal choice for size-critical vacuum OEM sensing solutions requiring ultra-low power consumption, excellent signal-to-noise ratio, and corrosion resistance to gases.
Typically, pressure measurement in harsh environments with power and size constraints based on the Pirani principle, such as portable analytical instruments and small mechanical pump systems
Swiss Neroxis Thermal Conductivity Gas Sensor Miniature Pirani Vacuum Gauge Pressure TransducerMTCS2300 Parameters:
Swiss Neroxis Thermal Conductivity Gas Sensor Miniature Pirani Vacuum Gauge Pressure TransducerMTCS2300 Selection:
| Ordering Information |
||
| MTCS230X |
X = 1: MTCS2301 = Al contacts |
X = 2: MTCS2302 = Au contacts |
| Model |
Description |
|
| MTCS230X-0 |
Only one sensing chip, no silicon cap, TO8 package |
|
| MTCS230X-10 |
Sensing chip with 10 µm air gap cap, TO8 package |
|
| MTCS230X-20 |
Sensing chip with 20 µm air gap cap, TO8 package |
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